Self-consistent model of low pressure inductively coupled RF discharge (Q2091517)
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scientific article; zbMATH DE number 7610470
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Self-consistent model of low pressure inductively coupled RF discharge |
scientific article; zbMATH DE number 7610470 |
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Self-consistent model of low pressure inductively coupled RF discharge (English)
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1 November 2022
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