Disturbance rejection run-to-run controller for semiconductor manufacturing (Q2181823)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Disturbance rejection run-to-run controller for semiconductor manufacturing |
scientific article |
Statements
Disturbance rejection run-to-run controller for semiconductor manufacturing (English)
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20 May 2020
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disturbance rejection controller
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discrete-time run-to-run control system
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wafer fabrication
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