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Mathematical modelling and analysis of temperature effects in MEMS - MaRDI portal

Mathematical modelling and analysis of temperature effects in MEMS (Q2208753)

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Mathematical modelling and analysis of temperature effects in MEMS
scientific article

    Statements

    title
    Mathematical modelling and analysis of temperature effects in MEMS (English)
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    author
    Tim Würth
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    publication date
    4 November 2020
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    zbMATH Keywords
    moving boundary problem
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    membrane deflection
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    electrostatic potential
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    well-posedness
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    cites work
    Q4802400
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    Q3558347
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    Q3093929
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    Q4284440
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    Q4327845
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    Identifiers

    Mathematics Subject Classification ID
    74F10
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    74F05
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    74F15
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    74K15
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    35Q74
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    zbMATH DE Number
    7269766
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    OpenAlex ID
    W2994750333
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