MEMS with fringing field: curvature-dependent electrostatic field and numerical techniques for recovering the membrane profile (Q2244039)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | MEMS with fringing field: curvature-dependent electrostatic field and numerical techniques for recovering the membrane profile |
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MEMS with fringing field: curvature-dependent electrostatic field and numerical techniques for recovering the membrane profile (English)
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11 November 2021
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MEMS devices
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fringing field
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BVP semi-linear elliptic problems
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shooting and Keller-box scheme
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III/IV stage/Lobatto IIIA formulaes
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