Geometric advection and its application in the emulation of high aspect ratio structures (Q2246344)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Geometric advection and its application in the emulation of high aspect ratio structures |
scientific article |
Statements
Geometric advection and its application in the emulation of high aspect ratio structures (English)
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16 November 2021
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level set
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process emulation
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geometric advection
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deep reactive ion etching
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design-technology-co-optimization
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