Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations (Q709928)
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scientific article; zbMATH DE number 5801616
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations |
scientific article; zbMATH DE number 5801616 |
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Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations (English)
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18 October 2010
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plasma etching
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etching profile
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level set method
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sparse field method
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3D simulations
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non-convex Hamiltonians
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0.8292105
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0.8190105
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0.81718445
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0.81637305
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0.8160518
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0.8085443
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0.8024211
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