Surface instability of thin polymer resist films with phase change effects on coating flow using numerical approximation techniques (Q2397223)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: Surface instability of thin polymer resist films with phase change effects on coating flow using numerical approximation techniques |
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Surface instability of thin polymer resist films with phase change effects on coating flow using numerical approximation techniques |
scientific article |
Statements
Surface instability of thin polymer resist films with phase change effects on coating flow using numerical approximation techniques (English)
0 references
30 May 2017
0 references
phase change
0 references
polymer resists
0 references
coating flow
0 references
0 references
0 references
0 references
0 references
