Accurate simulations of 2-D phase shift masks with a generalized discontinuous Galerkin (GDG) method (Q2430094)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Accurate simulations of 2-D phase shift masks with a generalized discontinuous Galerkin (GDG) method |
scientific article |
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Accurate simulations of 2-D phase shift masks with a generalized discontinuous Galerkin (GDG) method (English)
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5 April 2011
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generalized discontinuous Galerkin method (GDG)
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discontinuous Galerkin method (DG)
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phase shift masks (PSM)
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perfectly matched layer (PML)
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