Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning (Q2684639)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning |
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Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning (English)
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16 February 2023
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active disturbance rejection control
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tracking accuracy
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electronic manufacturing
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