Adaptive iterative extended state observer-based data-driven iterative learning model predictive control for semiconductor silicon single crystal batch process (Q2687804)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Adaptive iterative extended state observer-based data-driven iterative learning model predictive control for semiconductor silicon single crystal batch process |
scientific article |
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Adaptive iterative extended state observer-based data-driven iterative learning model predictive control for semiconductor silicon single crystal batch process (English)
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7 March 2023
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dynamic linearization
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adaptive iterative extended state observer
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model predictive control
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