Overview and new results in disturbance observer based adaptive vibration rejection with application to advanced manufacturing (Q2793966)
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scientific article; zbMATH DE number 6557753
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Overview and new results in disturbance observer based adaptive vibration rejection with application to advanced manufacturing |
scientific article; zbMATH DE number 6557753 |
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Overview and new results in disturbance observer based adaptive vibration rejection with application to advanced manufacturing (English)
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17 March 2016
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adaptive vibration rejection
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narrow-band disturbances
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advanced manufacturing
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inverse-based control
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semiconductor manufacturing
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disturbance observer
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