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Synchronizing control of reticle and wafer stages using iterative learning control (Q2860462)

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scientific article; zbMATH DE number 6230793
Language Label Description Also known as
English
Synchronizing control of reticle and wafer stages using iterative learning control
scientific article; zbMATH DE number 6230793

    Statements

    author
    Zhipeng Wu
    0 references
    Xinglin Chen
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    Yan Wang
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    publication date
    19 November 2013
    0 references
    zbMATH Keywords
    synchronization error
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    iterative learning control
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    master-slave control
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    reticle stage
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    wafer stage
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    title
    Synchronizing control of reticle and wafer stages using iterative learning control (English)
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    Identifiers

    zbMATH DE Number
    6230793
    0 references
     
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