Studies on deep ultraviolet transparent conductive Ga\(_2O_3\)/ITO/Ga\(_2O_3\) films (Q2895237)
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scientific article; zbMATH DE number 6052035
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Studies on deep ultraviolet transparent conductive Ga\(_2O_3\)/ITO/Ga\(_2O_3\) films |
scientific article; zbMATH DE number 6052035 |
Statements
2 July 2012
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Ca\(_2\)O\(_3\) ceramic target
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deep ultraviolet transparent conductive film
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Ga\(_2\)O\(_3\)/ITO/Ga\(_2\)O\(_3\) films
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electrical and optical property
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Studies on deep ultraviolet transparent conductive Ga\(_2O_3\)/ITO/Ga\(_2O_3\) films (English)
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