A robust computational algorithm for inverse photomask synthesis in optical projection lithography (Q2912286)
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scientific article; zbMATH DE number 6082573
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A robust computational algorithm for inverse photomask synthesis in optical projection lithography |
scientific article; zbMATH DE number 6082573 |
Statements
14 September 2012
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inverse lithography
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image synthesis
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total variation
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algorithm
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regularization
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Chambolle's fast duality projection algorithm
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A robust computational algorithm for inverse photomask synthesis in optical projection lithography (English)
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