A model for extreme ultraviolet radiation conversion efficiency from laser produced mass-limited tin-based droplet target plasmas (Q2913662)
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scientific article; zbMATH DE number 6087249
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A model for extreme ultraviolet radiation conversion efficiency from laser produced mass-limited tin-based droplet target plasmas |
scientific article; zbMATH DE number 6087249 |
Statements
26 September 2012
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conversion efficiency
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laser produced plasma
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extreme ultraviolet lithography
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A model for extreme ultraviolet radiation conversion efficiency from laser produced mass-limited tin-based droplet target plasmas (English)
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