A self-growing hidden Markov tree for wafer map inspection (Q3055628)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A self-growing hidden Markov tree for wafer map inspection |
scientific article |
Statements
A self-growing hidden Markov tree for wafer map inspection (English)
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8 November 2010
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hidden Markov model
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process monitoring
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wafer map
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wavelet transform
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