A general procedure for thermomechanical calibration of nano/micro-mechanical resonators (Q306895)
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scientific article; zbMATH DE number 6621345
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A general procedure for thermomechanical calibration of nano/micro-mechanical resonators |
scientific article; zbMATH DE number 6621345 |
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A general procedure for thermomechanical calibration of nano/micro-mechanical resonators (English)
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1 September 2016
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thermomechanical calibration
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MEMS
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NEMS
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classical resonator
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damped Brownian motion
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