Monte Carlo simulation of radio-frequency plasmas in N2 (Q3082612)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Monte Carlo simulation of radio-frequency plasmas in N2 |
scientific article |
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Monte Carlo simulation of radio-frequency plasmas in N2 (English)
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16 March 2011
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Monte Carlo simulation
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plasma
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radio-frequency
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sheath
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collision cross sections
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