Micro-three dimensional shape measurement method based on shadow Moiré using scanning electron microscopy (Q3430762)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Micro-three dimensional shape measurement method based on shadow Moiré using scanning electron microscopy |
scientific article |
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Micro-three dimensional shape measurement method based on shadow Moiré using scanning electron microscopy (English)
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23 March 2007
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electron microscopy
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Moirè topography
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diffraction limit
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measurement method
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backscattered electrons
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