Parametric Modelling of Microresonators Dynamics with Considering Thermal Effects (Q3595790)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Parametric Modelling of Microresonators Dynamics with Considering Thermal Effects |
scientific article |
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Parametric Modelling of Microresonators Dynamics with Considering Thermal Effects (English)
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28 August 2007
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MEMS dynamics
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thermoelastic
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microcantilever
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microresonators
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nonlinear modeling
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thermal damping
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thermal relaxation
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capacitive sensors
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