Statistical Aspects of Size Functions for the Description of Random Shapes: Applications to Problems of Lithography in Microelectronics (Q3618069)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Statistical Aspects of Size Functions for the Description of Random Shapes: Applications to Problems of Lithography in Microelectronics |
scientific article |
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Statistical Aspects of Size Functions for the Description of Random Shapes: Applications to Problems of Lithography in Microelectronics (English)
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31 March 2009
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