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Investigation of multi-layered-gate electrode workfunction engineered recessed channel (MLGEWE-RC) sub-50 nm MOSFET: A novel design - MaRDI portal

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Investigation of multi-layered-gate electrode workfunction engineered recessed channel (MLGEWE-RC) sub-50 nm MOSFET: A novel design (Q3626968)

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scientific article
Language Label Description Also known as
English
Investigation of multi-layered-gate electrode workfunction engineered recessed channel (MLGEWE-RC) sub-50 nm MOSFET: A novel design
scientific article

    Statements

    title
    Investigation of multi-layered-gate electrode workfunction engineered recessed channel (MLGEWE-RC) sub-50 nm MOSFET: A novel design (English)
    0 references
    publication date
    14 May 2009
    0 references
    zbMATH Keywords
    ATLAS
    0 references
    high-K
    0 references
    RC MOSFET
    0 references
    MLGEWE
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    two-dimensional modeling
    0 references

    Identifiers

    zbMATH DE Number
    5553979
    0 references
    OpenAlex ID
    W4256455381
    0 references
    DOI
    10.1002/JNM.699
    0 references
     
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