ANALYSIS OF REDISTRIBUTION OF RADIATION DEFECTS TAKING INTO ACCOUNT DIFFUSION AND SEVERAL SECONDARY PROCESSES (Q3631267)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | ANALYSIS OF REDISTRIBUTION OF RADIATION DEFECTS TAKING INTO ACCOUNT DIFFUSION AND SEVERAL SECONDARY PROCESSES |
scientific article |
Statements
ANALYSIS OF REDISTRIBUTION OF RADIATION DEFECTS TAKING INTO ACCOUNT DIFFUSION AND SEVERAL SECONDARY PROCESSES (English)
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5 June 2009
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ion implantation
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radiation defects
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alternating approach for modeling
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diffusion and secondary processes
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