Shape optimization of electrostatically actuated microbeams for extending static and dynamic operating ranges (Q381906)
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scientific article; zbMATH DE number 6228168
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Shape optimization of electrostatically actuated microbeams for extending static and dynamic operating ranges |
scientific article; zbMATH DE number 6228168 |
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Shape optimization of electrostatically actuated microbeams for extending static and dynamic operating ranges (English)
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15 November 2013
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microelectromechanical systems
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shape optimization
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nonprismatic beams
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pull-in instability
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penalty method
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finite element analysis
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