Modeling squeezed film air damping in torsional micromirrors using extended Kantorovich method (Q399813)
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scientific article; zbMATH DE number 6332674
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Modeling squeezed film air damping in torsional micromirrors using extended Kantorovich method |
scientific article; zbMATH DE number 6332674 |
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Modeling squeezed film air damping in torsional micromirrors using extended Kantorovich method (English)
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20 August 2014
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micromirror
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squeezed film damping
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Reynolds equation
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extended Kantorovich method (EKM)
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