Solid damping in micro electro mechanical systems (Q1026529)
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scientific article; zbMATH DE number 5570681
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Solid damping in micro electro mechanical systems |
scientific article; zbMATH DE number 5570681 |
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Solid damping in micro electro mechanical systems (English)
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25 June 2009
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microelectromechanical systems
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damping
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mechanical dissipation
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thermoelasticity
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nonlocal model
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