The Behaviour of the Etching Rate in a Model of Plasma Etching (Q4306788)
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scientific article; zbMATH DE number 641548
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | The Behaviour of the Etching Rate in a Model of Plasma Etching |
scientific article; zbMATH DE number 641548 |
Statements
The Behaviour of the Etching Rate in a Model of Plasma Etching (English)
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15 January 1995
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parallel computation
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boundary element method
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domain decomposition methods
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coupled boundary element - finite element - codes
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