No label defined (Q4309759)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: scientific article; zbMATH DE number 665495 |
scientific article; zbMATH DE number 665495
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | No label defined |
scientific article; zbMATH DE number 665495 |
Statements
2 February 1995
0 references
two-dimensional process simulation
0 references
doping profiles
0 references
moving boundaries
0 references
oxidation-diffusion problem
0 references
process simulator MIMAS-II
0 references
oxide growth
0 references
dopant diffusion
0 references
moving grid method
0 references
finite element
0 references
numerical results
0 references
