THE DEVELOPMENT OF THE RADIATION ENHANCED DIFFUSION MODEL OF BORON IN SILICON (Q4315343)
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scientific article; zbMATH DE number 700444
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | THE DEVELOPMENT OF THE RADIATION ENHANCED DIFFUSION MODEL OF BORON IN SILICON |
scientific article; zbMATH DE number 700444 |
Statements
THE DEVELOPMENT OF THE RADIATION ENHANCED DIFFUSION MODEL OF BORON IN SILICON (English)
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8 December 1994
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boron in silicon
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radiation
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diffusion
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kinetic reaction
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Monte Carlo
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