The oxidation process of silicon: Modelling and mathematical treatment (Q4320632)
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scientific article; zbMATH DE number 718610
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | The oxidation process of silicon: Modelling and mathematical treatment |
scientific article; zbMATH DE number 718610 |
Statements
The oxidation process of silicon: Modelling and mathematical treatment (English)
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2 February 1995
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mathematical model describing the oxidation process of silicon
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phase field model
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local existence result
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