Stress-Dependent Local Oxidation of Silicon (Q4594900)
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scientific article; zbMATH DE number 6813055
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Stress-Dependent Local Oxidation of Silicon |
scientific article; zbMATH DE number 6813055 |
Statements
Stress-Dependent Local Oxidation of Silicon (English)
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27 November 2017
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silicon oxidation
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stress-dependent reaction coefficient
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matched asymptotic expansions
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