Optimal design of induction heating equipment for high‐speed processing of a semiconductor (Q4665492)
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scientific article; zbMATH DE number 2154929
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Optimal design of induction heating equipment for high‐speed processing of a semiconductor |
scientific article; zbMATH DE number 2154929 |
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Optimal design of induction heating equipment for high‐speed processing of a semiconductor (English)
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11 April 2005
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optimal design
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induction heating processes of semiconductor
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