Electron beam lithography with a Gaussian current distribution for nanolithography (Q468794)
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scientific article; zbMATH DE number 6367146
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Electron beam lithography with a Gaussian current distribution for nanolithography |
scientific article; zbMATH DE number 6367146 |
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Electron beam lithography with a Gaussian current distribution for nanolithography (English)
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10 November 2014
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