An Elementary Model for Control of a Semiconductor Etching Process (Q4787270)
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scientific article; zbMATH DE number 1848776
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | An Elementary Model for Control of a Semiconductor Etching Process |
scientific article; zbMATH DE number 1848776 |
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An Elementary Model for Control of a Semiconductor Etching Process (English)
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5 January 2003
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semiconductor etching
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mathematical modeling
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spectroscopic ellipsometry
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control
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