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Q4966193 - MaRDI portal

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scientific article; zbMATH DE number 7324756
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English
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scientific article; zbMATH DE number 7324756

    Statements

    author
    S. G. Ovchinnikov
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    Sergeĭ N. Varnakov
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    Q4966192
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    Alexander Efremov
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    publication date
    18 March 2021
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    zbMATH Keywords
    CAD
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    mathematical modeling
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    ellipsometer
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    overload modeling
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    finite element method
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    Identifiers

    zbMATH DE Number
    7324756
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