The Nonlinear Dynamic Behaviors of Electrostatic Micro-Tweezers (Q5160073)
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scientific article; zbMATH DE number 7416269
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | The Nonlinear Dynamic Behaviors of Electrostatic Micro-Tweezers |
scientific article; zbMATH DE number 7416269 |
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The Nonlinear Dynamic Behaviors of Electrostatic Micro-Tweezers (English)
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28 October 2021
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microelectromechanical
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pull-in
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differential quadrature method (DQM)
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MEMS
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electrostatic
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micro-tweezers
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