Scheduling of multiple in-line steppers for semiconductor wafer fabs (Q5172568)
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scientific article; zbMATH DE number 6397221
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Scheduling of multiple in-line steppers for semiconductor wafer fabs |
scientific article; zbMATH DE number 6397221 |
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Scheduling of multiple in-line steppers for semiconductor wafer fabs (English)
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4 February 2015
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scheduling
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semiconductor
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flow shop
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port capacity constraints
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genetic algorithm
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meta-heuristic algorithms
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0.9153433
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0.88001686
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0.86482435
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0.86101115
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0.8608638
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0.8580649
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0.8544969
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0.84574926
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