Reduced order model compensator control of species transport in a CVD reactor (Q5317787)
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scientific article; zbMATH DE number 2206647
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Reduced order model compensator control of species transport in a CVD reactor |
scientific article; zbMATH DE number 2206647 |
Statements
21 September 2005
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linear-quadratic control
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proper orthogonal decomposition
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reduced order model
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chemical vapour deposition
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Dirichlet boundary control
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Reduced order model compensator control of species transport in a CVD reactor (English)
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