Numerical modeling of 3‐D comb drive electrostatic accelerometers structure (method of levitation force reduction) (Q5323856)
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scientific article; zbMATH DE number 5588877
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Numerical modeling of 3‐D comb drive electrostatic accelerometers structure (method of levitation force reduction) |
scientific article; zbMATH DE number 5588877 |
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Numerical modeling of 3‐D comb drive electrostatic accelerometers structure (method of levitation force reduction) (English)
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31 July 2009
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force measurement
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modelling
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object-oriented methods
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vectors
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