Critical pull-in curves of MEMS actuators in presence of Casimir force (Q6065086)
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scientific article; zbMATH DE number 7775135
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Critical pull-in curves of MEMS actuators in presence of Casimir force |
scientific article; zbMATH DE number 7775135 |
Statements
Critical pull-in curves of MEMS actuators in presence of Casimir force (English)
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11 December 2023
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pull-in curves
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Coulomb force
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Casimir force
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periodic motion
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stagnation point
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touch down
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electrostatic actuation
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MEMS
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