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Model of the coating growth under the conditions of magnetron sputtering deposition - MaRDI portal

Model of the coating growth under the conditions of magnetron sputtering deposition (Q619379)

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scientific article; zbMATH DE number 5840748
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English
Model of the coating growth under the conditions of magnetron sputtering deposition
scientific article; zbMATH DE number 5840748

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    Model of the coating growth under the conditions of magnetron sputtering deposition (English)
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    24 January 2011
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    mathematical modeling
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    growing coating
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    magnetron sputtering deposition
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