Design and modeling of some sensing and actuating mechanisms for MEMS applications (Q651720)
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scientific article; zbMATH DE number 5989336
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Design and modeling of some sensing and actuating mechanisms for MEMS applications |
scientific article; zbMATH DE number 5989336 |
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Design and modeling of some sensing and actuating mechanisms for MEMS applications (English)
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18 December 2011
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sensing
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actuating
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bimetal
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MEMS
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capacitance
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