Gaussian process modeling for engineered surfaces with applications to Si wafer production (Q6537848)
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scientific article; zbMATH DE number 7847479
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Gaussian process modeling for engineered surfaces with applications to Si wafer production |
scientific article; zbMATH DE number 7847479 |
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Gaussian process modeling for engineered surfaces with applications to Si wafer production (English)
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14 May 2024
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designed experiment
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functional response
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quality control
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statistical process control
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