A virtual metrology system based on least angle regression and statistical clustering (Q6570838)
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scientific article; zbMATH DE number 7879673
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A virtual metrology system based on least angle regression and statistical clustering |
scientific article; zbMATH DE number 7879673 |
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A virtual metrology system based on least angle regression and statistical clustering (English)
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10 July 2024
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semiconductor manufacturing
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virtual metrology
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least angle regression
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neural networks
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statistical distance
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