Non-parametric local capability indices for industrial planar manufacts: an application to the etching phase in the microelectronic industry (Q6580749)
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scientific article; zbMATH DE number 7888951
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Non-parametric local capability indices for industrial planar manufacts: an application to the etching phase in the microelectronic industry |
scientific article; zbMATH DE number 7888951 |
Statements
Non-parametric local capability indices for industrial planar manufacts: an application to the etching phase in the microelectronic industry (English)
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29 July 2024
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Bayesian semiparametric quantile regression
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dry etching
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microelectronics
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thin plate spline
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