Non-parametric local capability indices for industrial planar manufacts: an application to the etching phase in the microelectronic industry

DOI10.1002/ASMB.2673MaRDI QIDQ6580749

Riccardo Borgoni, Diego Zappa, Vincenzo Emanuele Farace

Publication date: 29 July 2024

Published in: Applied Stochastic Models in Business and Industry (Search for Journal in Brave)

zbMATH Keywords

thin plate splinemicroelectronicsBayesian semiparametric quantile regressiondry etching

Mathematics Subject Classification ID

Statistics (62-XX)

Cites Work

• Bayesian inference for additive mixed quantile regression models
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• Regression Quantiles
• Quantile smoothing splines
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• Bayesian semiparametric additive quantile regression
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• Bayesian quantile regression
• Fast Calibrated Additive Quantile Regression
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