Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing (Q6589069)
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scientific article; zbMATH DE number 7898251
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing |
scientific article; zbMATH DE number 7898251 |
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Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing (English)
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19 August 2024
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convolutional neural networks
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multivariate analysis
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semiconductor manufacturing
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virtual metrology
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