Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment (Q662795)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment |
scientific article; zbMATH DE number 6009225
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment |
scientific article; zbMATH DE number 6009225 |
Statements
Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment (English)
0 references
24 February 2012
0 references
sputtering
0 references
Boltzmann kinetic equation
0 references
