Singularly perturbed BVP to estimation of diaphragm deflection in MEMS capacitive microphone: an application of ADM (Q671167)
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scientific article; zbMATH DE number 7039671
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Singularly perturbed BVP to estimation of diaphragm deflection in MEMS capacitive microphone: an application of ADM |
scientific article; zbMATH DE number 7039671 |
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Singularly perturbed BVP to estimation of diaphragm deflection in MEMS capacitive microphone: an application of ADM (English)
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20 March 2019
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Adomian decomposition method
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analytical solution
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diaphragm deflection
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singular perturbation
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semi-group theory
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capacitive microphone
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