Stable method for optical monitoring the deposition of multilayer optical coatings (Q828142)

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scientific article; zbMATH DE number 7291194
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Stable method for optical monitoring the deposition of multilayer optical coatings
scientific article; zbMATH DE number 7291194

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    Stable method for optical monitoring the deposition of multilayer optical coatings (English)
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    8 January 2021
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    multilayer coatings
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    monochromatic optical monitoring
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    numerical algorithms
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    analysis of experimental data
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